About: http://webisa.webdatacommons.org/103476405

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In such a manner as to cover the memory cell formation region MCR, for example, an interlayer insulation film IL1 including a silicon oxide film is formed.
http://www.w3.org/ns/prov#wasQuotedFrom	freshpatents.com