| http://www.w3.org/ns/prov#value | - A susceptor, comprising:a susceptor wafer support plate composed of aluminum nitride having an electrically conductive element embedded therein, said plate including a back side from which wiring connected to said electrically conductive element embedded therein emerges; a support stand configured to form a tube, said tube having a first end configured to form a joint with said back side of said s
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