About: http://webisa.webdatacommons.org/103640112

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	In the case where the device is made of silicon, the insulating layer 36 may be made of such substance as SiO2, Si3 N4, Al2 O3, AlN or their compound film.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com.au