About: http://webisa.webdatacommons.org/103762801

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	One method of fabricating the relatively deep, e.g. 200 um) vias for the electrical connectors 71, 72, 73, 74 uses deep RIE processing into a silicon body.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com