About: http://webisa.webdatacommons.org/104317515

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Conventional and/or future-developed lithographic, etching and other processes may be employed to define the microelectronic device 100 from the deposited layer(s).
http://www.w3.org/ns/prov#wasQuotedFrom	google.com