About: http://webisa.webdatacommons.org/104420068

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	a light emitting means for emitting light toward said substrate on said rotary stage by directing the light toward the edge of said substrate including the edge of said transparent layer and the edge of said nontransparent layer; and
http://www.w3.org/ns/prov#wasQuotedFrom	google.com