PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • a light emitting means for emitting light toward said substrate on said rotary stage by directing the light toward the edge of said substrate including the edge of said transparent layer and the edge of said nontransparent layer; and
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com