| http://www.w3.org/ns/prov#value | - Even by such a method, however, since there is a case where a void or a pin hole occurs in the insulative layer, further improvement is demanded in terms of a point that the insulation performance between the upperand lower wirings and the airtight performance are maintained.SUMMARY OF THE INVENTIONIt is an object of the invention to prevent the occurrence of a void and a pin hole in an insulative
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