| http://www.w3.org/ns/prov#value | - velength in the range of 5-20 nm), as well as particle beams, such as ion beams or electron beams.The term ???lens???, where the context allows, may refer to any one or combination of various types of optical components, including refractive, reflective, magnetic, electromagnetic and electrostatic optical components.While specific embodiments of the invention have been described above, it will be
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