About: http://webisa.webdatacommons.org/104819358

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	ature of the deposition process is necessary for avoiding problems such as physical damage and inter-diffusion of mobile ions between adjacent layers.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com