| http://www.w3.org/ns/prov#value | - For example, the exposing device 410 may be or comprise one or more stepper, step-and-scan, and/or other lithography components, modules, or systems.The optical property measurer 420 may be any device, system, component, or other apparatus configured to measure optical properties of at least a portion of the mask before and/or after the mask is utilized by the exposing device 410 during one or mor
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