| http://www.w3.org/ns/prov#value | - of the state after removal of a sacrificial layer in the production of the semiconductor device according to the ninth embodiment; FIG. 46 is a sectional view of the state after deposition of a conductive film in the production of the semiconductor device according to the ninth embodiment; FIGS. 47A and 47B are a plan view and a sectional view along the line A-A of the state after formation of wor
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