| http://www.w3.org/ns/prov#value | - For such reasons, the pod is gaining popularity as a wafer carrier in the batch-type CVD system recently. [0004] In general, a batch-type CVD system having a pod as a wafer carrier includes a process tube for performing a desired process to wafers, a boat for loading/unloading a plurality, e.g. 150 sheets, of wafers into/from the process tube, a wafer loading port for supporting one or more pods w
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