| http://www.w3.org/ns/prov#value | - More specifically, oxides and nitrides may be materials such as silicon dioxide (SiO2), silicon nitride, tetraethylorthosilicate (TEOS) based oxides, borophospho-silicate-glass (BPSG), phospho-silicate-glass (PSG), boro-silicate-glass (BSG), oxide-nitride-oxide (ONO), plasma enhanced silicon nitride (P-SiNx), a spin on glass (SOG), composite oxides and/or nitride materials, and/or like dielectric
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