| http://www.w3.org/ns/prov#value | - As further shown in FIG. 4B, substrate tiles 310 are held in X and Y position, for example and without limitation, with respect to adjacent ones of substrate tiles 310 so that probe tips 322 are held in X and Y registration in a test plane, and substrate tiles 310 are aligned so that probe tips 322 thereon are substantially coplanar to the test plane (i.e., to a portion of the test plane to which
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