About: http://webisa.webdatacommons.org/10572564

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	A method of evaluating a semiconductor wafer including a substrate and at least one layer formed there, said wafer having been subjected to an etching process, said method comprising the steps of:
http://www.w3.org/ns/prov#wasQuotedFrom	google.com