| http://www.w3.org/ns/prov#value | - of defects in each of said die fields on said substrate, location information of each defect within each of said plurality of die fields on said substrate, and other characteristics of each of said defects on said substrate, said method comprising the steps of:generating a die field defect map having a two dimensional size and shape that corresponds to a size of a die of interest to be produced wh
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