| http://www.w3.org/ns/prov#value | - olishing pad used in polishing micro-device workpiecesUS703325123 Aug 200425 Apr 2006Micron Technology, Inc.Carrier assemblies, polishing machines including carrier assemblies, and methods for polishing micro-device workpiecesUS70371799 May 20022 May 2006Micron Technology, Inc.Methods and apparatuses for making and using planarizing pads for mechanical and chemical-mechanical planarization of micr
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