| http://www.w3.org/ns/prov#value | - For instance, there is such a problem that a ringing (resonance) phenomenon arises between leads disposed with a spacing of 30 ??m, so that a signal waveform of clock pulse deforms remarkably. [0004] In order to overcome such problem as described above, the following constitution is considered effective, Namely, the constitution is arranged in such that a ground layer is disposed on the surface op
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