| http://www.w3.org/ns/prov#value | - For example, in one embodiment, the at least one surface of the diffusion barrier layer may be substantially free of an elemental metal when it is comprised of a material other than a pure metal (i.e., metal carbide, metal nitride, metal carbonitride, metal silicon carbide, metal silicon nitride, or metal silicon carbonitride) and has a substantially (111) preferred orientation, i.e., has 95% or g
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