PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • or securement to the wafer carrier, and a lower end surrounding the wafer, with the lower end having a portion of the inner surface contacting the wafer peripheral edge so as to confine wafer movement during a polishing operation; the retainer body inner surface extending from the upper end to the lower end and including a first portion spanning at least a portion of the thickness of the wafer car
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com