| http://www.w3.org/ns/prov#value | - ontrol of liquid movementUS760483613 Dec 200620 Oct 2009Hitachi Global Storage Technologies Netherlands B.V.Release layer comprised of perfluoropolyether diacrylate material is formed on master tool and stamper tool which are used to form patterns in resist material, such as hole or pillar patterns; lower viscosity and surface tension than prior resist materials allows for more uniform replication
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