| http://www.w3.org/ns/prov#value | - For example, the coating and developing system M1 has a structure with a cassette station 40 carrying, for example, the twenty-five wafers W in the coating and developing system M1 from outside or carrying them out of the coating and developing system M1 in the unit of cassette, or carrying the wafers W in or out of the cassette C, a processing station 41 having various types of processing units i
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