| http://www.w3.org/ns/prov#value | - Moreover, as a heating treatment, the heating may be carried out at the heating temperature at 50??? C. or more where the substrate is durable under the vacuum, preferably, the heating may be carried out at 65???150??? C., and the impurities such as oxygen, moisture and the like attached to the substrate and impurities such as oxygen, moisture and the like in the film formed on the substrate are r
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