PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • A second aspect of the present invention is a developing method for exposing a resist film formed on a substrate in a predetermined pattern and thereafter developing the exposed pattern, comprising the steps of (a) applying a solution having a photosensitive radical onto the entire upper surface of the resist film on the substrate, (b) applying a developing solution onto the entire upper surface o
http://www.w3.org/ns/prov#wasQuotedFrom
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