| http://www.w3.org/ns/prov#value | - onitride, hydrogenated silicon carbonitride, boronitride, antireflective coatings, photoresists, organic polymers, porous organic and inorganic materials, metals such as copper and aluminum, and diffusion barrier layers such as but not limited to TiN, Ti(C)N TaN, Ta(C)N, Ta, W, or WN. [0073] Although the invention is particularly suitable for providing films and products of the invention are large
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