| http://www.w3.org/ns/prov#value | - TABLE 2 Comparison of dissolution rate and etch rate of different polymers POLYMER MW/Pd DR, nm/s Etch Rate, ???/min Poly (XLVI) 14600/2.84 33 830 Poly (XLVII) 12800/2.61 9 762 Poly (I) 21000/2.57 126 676 While the present invention has been particularly described in conjunction with a specific preferred embodiment and other alternative embodiments, it is evident that numerous alternatives, modifi
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