| http://www.w3.org/ns/prov#value | - odiment of the present invention showing a sputtering apparatus in which the cathode is in the form of the target cage shown in FIGS. 1 and 2; FIG. 4 is a plan view taken along line 44 of FIG. 3 showing substrates to be coated mounted outside of the volume defined by the target cage; FIG. is an enlarged, partial plan view of the disclosure of FIG. 2 showing the parallel, elongated rods spaced such
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