| http://www.w3.org/ns/prov#value | - Moreover, since this card is unrelated to the effect of magnetic fields, reading of the data in the card for criminal purposes is prevented. [0298] Seventh Embodiment [0299] The seventh embodiment uses a spatial light modulator 780 of the present invention built into an exposure device, for writing a lot number and other information specific to the wafer on the surface of a semiconductor wafer 770
|