| http://www.w3.org/ns/prov#value | - However, there is a problem in that if a metal element having a catalytic function (herein, all the metal elements having a catalytic function are called a catalytic element) is added, the metal element remains in or on a semiconductor film, which varies electrical characteristics of a TFT. For example, an off current of a TFT increases to vary the electrical characteristics among respective eleme
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