| http://www.w3.org/ns/prov#value | - Note that the interlayer insulating film 16 a is made from an inorganic material such as silicon oxide or silicon nitride; the interlayer insulating film 16 b is made from acrylic, siloxane (a compound having a skeleton formed from a bond of silicon (Si) and oxygen (O) and has a substituent of an alkyl group or the like), or a self-planarizing substance which can form a film by coating, such as si
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