PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • To achieve the object, there is provided a plasma processing apparatus having a processing chamber in which a wear environment is formed, the apparatus including a component disposed in the processing chamber; and a bolt for attaching the component to a base portion formed of a brittle member, wherein the bolt includes a head formed of a wear resistant material, a body which is formed of a resin h
http://www.w3.org/ns/prov#wasQuotedFrom
  • google.com