About: http://webisa.webdatacommons.org/107384146

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Contact holes or vias are etched through the insulator layer to expose underlying interconnect lines, or to expose semiconductor devices such as gates.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com