| http://www.w3.org/ns/prov#value | - of said plurality of reticle fields on said substrate, and other characteristics of each of said defects on said substrate, said method comprising the steps of:generating a reticle field defect map having a two dimensional size and shape that corresponds to a size of a reticle of interest that was used a plurality of times in processing of said substrate, with all of the defects from each of selec
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