| http://www.w3.org/ns/prov#value | - FT. [0134] Formed through the above steps are the TFT (only the drain region 32 is shown in the drawing), the gate insulating film 33, the interlayer insulating film 35, and layers 36 a to 36 d of the first electrode (FIG. 3A). [0135] The layers 36 a to 36 d of the first electrode in this embodiment are each a film mainly containing an element selected from the group consisting of Ti, TiN, TiSixNy
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