| http://www.w3.org/ns/prov#value | - of the negative-type photosensitive polymer film to the light and then removing an unexposed area of the negative-type photosensitive polymer film, or by exposing an area other than a desired area of the positive-type photosensitive polymer film to the light and then removing the exposed area of the positive-type photosensitive polymer film; the patterned polymer film is a polyimide film; the ste
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