| http://www.w3.org/ns/prov#value | - Moreover, cathode sputtering can be performed by putting a mother die treated similarly to the case of the vacuum evaporation in a vacuum system in which a cathode plate capable of mounting a smooth and desired metallic foil and an anode table made of a metal such as aluminum or iron for mounting a material to be treated and setting the mother die on the anode table, setting a metallic foil same a
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