| http://www.w3.org/ns/prov#value | - Consequently, a surface protecting property can be enhanced. [0031] Moreover, this method is particularly effective for the case in which the dielectric film is a silicon oxide film having a thickness of 5 nm or less based on various experimental results, of which reasons are not obvious. [0032] Furthermore, it is desirable that the conductive film should be a silicon type conductive film. [0033]
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