| http://www.w3.org/ns/prov#value | - To achieve the above object, the third aspect of the present invention is a method of generating an exposure pattern for lithography to create a cross-pattern, such a cross-shaped pattern, comprising a step of separating the cross-pattern into an L-shaped pattern and a rectangular pattern, a step of generating a first enlarged pattern by moving the edges of the L-shaped pattern to the external ang
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