| http://www.w3.org/ns/prov#value | - However, when the thickness of a thin film formed on a surface of a substrate is measured by a method using eddy current in such a state that the substrate to be polished is held by the top ring, the chucking plate 342 should preferably be made of a non-magnetic material, e.g., an insulating material such as fluororesin or ceramics. [0232] A pressurizing sheet 344, which comprises an elastic membr
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