| http://www.w3.org/ns/prov#value | - Contact terminals 392 are arrayed on a distal end of flexible printed wiring layer 396 on an extension shown with brackets in FIG. 4D. As further shown in FIG. 4D, substrate tiles 310 are held in X and Y position, for example and without limitation, with respect to adjacent ones of substrate tiles 310 so that probe tips 322 are held in X and Y registration in a test plane, and substrate tiles 310
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