| http://www.w3.org/ns/prov#value | - For example, there is a method where a plurality of balls are brought into a metal-made basket as a barrel, and while rotating the barrel, the film-forming components are supplied from the plasma source or the ion source for forming the film, but the size of the ball is limited or unevenness is easy to occur in the film thickness. [0449] Therefore, this method of the invention solves the above men
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