PropertyValue
http://www.w3.org/1999/02/22-rdf-syntax-ns#type
http://www.w3.org/ns/prov#value
  • To this end, the present invention provides a defect inspecting apparatus capable of discriminating whether a defect such as a foreign particle is located on the obverse or reverse surface of a flat object based on irradiating the flat object with a beam of light which is supplied from a light source and which is multiple-color light having predetermined wavelength ranges or white light of a broad
http://www.w3.org/ns/prov#wasQuotedFrom
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