| http://www.w3.org/ns/prov#value | - For example, there is a method which comprises: aligning the edge of an evaluation pattern with design data before measuring the distance of a difference therebetween, and evaluating how faithfully to the design data the actual pattern is formed, thereby judging whether the sample is good or bad, and there is also a method which compares the edge of an actual pattern with a lithography simulation
|
