| http://www.w3.org/ns/prov#value | - However, the conventional laser of FIG. 3 has the shortcomings that, since the etching of the active layer 17 is made to form the thinner parts 17',17', two sequences of epitaxial growths and delicate controlling of the etching are necessary, and further that there is a considerable possibility of introducing a number of non radiative center to the interface between the surface of the active layer
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