| http://www.w3.org/ns/prov#value | - of a SiCOH layer after different plasma treatments 1st treatment 2nd treatment K value SiCOH after cure ??? ??? 3.0 Sample 1 H2 none 2.76 Sample 2 He none 2.78 Sample 3 H2 H2 2.731 Sample 4 He He 2.739 Sample 5 H2 He 2.727 Sample 6 He H2 2.720 While this invention has been particularly shown and described with reference to, the preferred embodiments thereof, it will be understood by those skilled
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