| http://www.w3.org/ns/prov#value | - More specifically the invention concerns a method for defining, modeling, visualizing, analyzing and simulating thegeometry of a micro-electro mechanical (MEMS) device through the accurate reproduction in a virtual environment of a set of process steps involved in the fabrication of such a MEMS or other semiconductor device and the visualization, simulation andanalysis of the device when it is sub
|
