| http://www.w3.org/ns/prov#value | - Note that the slurry may be supplied only when necessary. [0171] The electrolytic solution feeder 81 feeds an electrolytic solution EL including a chelating agent to the wafer W through a not illustrated feed nozzle. [0172] The electrolyte can be one based on an organic solvent or an aqueous solution. [0173] The acid used for the electrolyte may include for example copper sulfate, ammonium sulfate
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