About: http://webisa.webdatacommons.org/108913556

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Although electroplating of copper is a well-established technique, reliably depositing copper over large diameter substrates, havinga patterned surface including trenches and vias, is a challenging task for process engineers.
http://www.w3.org/ns/prov#wasQuotedFrom	docstoc.com