About: http://webisa.webdatacommons.org/109010086

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	All patents, patent applications and other documents referenced herein are hereby incorporated by reference.BRIEF DESCRIPTION OF THE FIGURES FIG. 1 shows equipment architectures for a variety of manufacturing equipment types.
http://www.w3.org/ns/prov#wasQuotedFrom	freepatentsonline.com