About: http://webisa.webdatacommons.org/109041328

Property	Value
http://www.w3.org/1999/02/22-rdf-syntax-ns#type	http://www.w3.org/ns/prov#Entity
http://www.w3.org/ns/prov#value	Also, the production method is not limited to CVD. Sol-gel techniques, vacuum deposition, sputtering, and other techniques are also available.
http://www.w3.org/ns/prov#wasQuotedFrom	google.com